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AI Overview

MEMS accelerometer calibration corrects for bias offset, scale factor errors, non-orthogonality, and temperature-induced drift to improve measurement accuracy, often using techniques like the

six-position method, Kalman filtering, and temperature-controlled testing . Common methods involve rotating the sensor to measure gravitational acceleration (

positive 1 cap G comma negative 1 cap G

) on each axis, using data for mathematical modeling to calculate zero-g bias and scale factors.

This video demonstrates how to calibrate an accelerometer using a 2G roll check:

58s

Diversified Technical Systems - DTS

YouTube • Dec 8, 2021

Common MEMS Calibration Techniques

Six-Position Method : The sensor is placed in six different static orientations, with the x, y, and z axes facing up and down to measure the response to gravity (

$positive 1 g comma negative 1 g$

).
Two-Position Method : A simpler method used to calculate basic bias and scale factor by measuring the output when the sensor is flipped 180 degrees (e.g.,

$positive 1 g$

and

$negative 1 g$

).
Kalman Filter Optimization : Used to improve the accuracy of the six-position method by filtering raw data, which significantly reduces noise and improves, for example, pitch calculation precision from

$0.2646 m/s squared$

to

$0.0066 m/s squared$

.
Temperature Compensation : MEMS sensors are placed in a thermal chamber to create an error model that compensates for drift across different temperature ranges.
Gauss-Newton Optimization : Used for 9-position calibration to determine non-orthogonal errors, scale factors, and zero biases.
Back-to-Back Comparison : The MEMS sensor is mounted on a shaker alongside a calibrated reference sensor for frequency response calibration.

You can watch this video to see how a shaker is used for accelerometer calibration:

52s

The Modal Shop

YouTube • Oct 26, 2010

Key Parameters Calibrated

Zero-G Bias: Calculated as

$the fraction with numerator positive 1 cap G voltage plus negative 1 cap G voltage and denominator 2 end-fraction$

.
Scale Factor: Calculated as

$the fraction with numerator positive 1 cap G voltage minus negative 1 cap G voltage and denominator 2 end-fraction$

.
Sensitivity: Defined as

$the fraction with numerator the absolute value of plus 1 cap G end-absolute-value plus the absolute value of minus 1 cap G end-absolute-value and denominator 2 end-fraction cross 1000$

(in mV/G).
Non-Orthogonality: Corrects for axis misalignment.

In-Field and Advanced Techniques

Bayesian Modeling : Incorporates uncertainty and prior knowledge into calibration, treating model parameters as variables rather than fixed values.
Portable Vibration Calibrators : Used for on-site, low-frequency validation of DC MEMS accelerometers.
Genetic Algorithm : A hybrid method used for in-field calibration, involving fewer than 25 iterations to find 9 parameters (errors, factors, biases).

This video demonstrates how to calibrate a MEMS accelerometer using a portable vibration calibrator:

53s

The Modal Shop

YouTube • Jul 6, 2023

Calibration Mathematical Formulas

Zero-G Bias:

$one-half cross open paren positive 1 cap G voltage plus negative 1 cap G voltage close paren$

.
Scale Factor:

$one-half cross open paren positive 1 cap G voltage minus negative 1 cap G voltage close paren$

.
Sensitivity:

$the fraction with numerator the absolute value of plus 1 cap G end-absolute-value plus the absolute value of minus 1 cap G end-absolute-value and denominator 2 end-fraction cross 1000 mV/G$

.

Verifying MEMS Accelerometer Accuracy Without a Lab
Position the sensor flat with the lid or sensitive axis facing upwards to measure the +1G output. Record the voltage. Then, rotate...

Unmanned Systems Technology
Calibration of MEMS Sensors for Precision Measurement of Acceleration, Spin and Attitude | IEEE Conference Publication

IEEE
Calibration of MEMS Accelerometer Based on Kalman Filter ...
Abstract—The measurement precision of Micro Electronic Mechanical System (MEMS) accelerometer are influenced by zero drift, scale ...

Journal of Communications

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Videos

Calibrating DC MEMS Accelerometers with a Portable ...

YouTube The Modal Shop

May 31, 2019

6:34

Duplicate the OEM's calibration process for DC MEMS accelerometers from 1 to 100 Hz using a portable vibration calibrator.

Design and Analysis of MEMS Accelerometers

YouTube Diego Emilio Serrano

Feb 1, 2023

1:38:20

In this session I'm gonna be covering uh the design and Analysis of mems accelerometer so I discovered the gyroscope session.

Selecting the Best Accelerometer for Your Test

YouTube The Modal Shop

Oct 29, 2019

50:09

Learn about accelerometer types, designs, characteristics, and applications in this webinar series on accelerometer design and theory.

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Verifying MEMS Accelerometer Accuracy Without a Lab

Unmanned Systems Technology

https://www.unmannedsystemstechnology.com › feature

Unmanned Systems Technology

https://www.unmannedsystemstechnology.com › feature

Practical Field Calibration . This calibration method is compatible with all Silicon Designs test modules and surface-mount accelerometers, regardless of model. Read more

An Improved Calibration Technique for MEMS Accelerometer ...

National Institutes of Health (NIH) | (.gov)

https://pmc.ncbi.nlm.nih.gov › articles › PMC7014186

National Institutes of Health (NIH) | (.gov)

https://pmc.ncbi.nlm.nih.gov › articles › PMC7014186

by J Zhu 2020 Cited by 41 — In this paper, we proposed an improved calibration technique for MEMS accelerometer-based inclinometers . First, a single-parameter calibration model was ... Read more

Calibrating MEMS DC Accelerometers

The Modal Shop

https://www.modalshop.com › seismic-vibration › calibra...

The Modal Shop

https://www.modalshop.com › seismic-vibration › calibra...

Watch and learn how to calibrate a MEMS Acceleration sensor using a Low Frequency Portable Vibration Calibrator Model 9210D. Read more

investigating mems accelerometer

University of Central Arkansas — UCA

https://faculty.uca.edu › Will_Ward › thesis

University of Central Arkansas — UCA

https://faculty.uca.edu › Will_Ward › thesis

PDF

by W Ward 2023 — One method of removing systematic errors from accelerometers is to manually adjust measurements to 0 m/s2 when the sensor is known (or approximated) to be at ... Read more

44 pages

Method for In-Field User Calibration of MEMS ...

TSI Journals

https://www.tsijournals.com › articles › method-fo...

TSI Journals

https://www.tsijournals.com › articles › method-fo...

PDF

Jul 30, 2023 — This paper describes the approach to the static calibration of an accelerometer without using any mechanical equipment on the basis of the fact ... Read more

16 pages

Calibration of MEMS Accelerometer Based on Kalman ...

Journal of Communications

https://www.jocm.us › show-161-983-1

Journal of Communications

https://www.jocm.us › show-161-983-1

In order to increase the measurement accuracy of the MEMS accelerometer , an improved calibration method is proposed on the basis of traditional six position ... Read more

Missing: ~~techniques~~ ‎| Show results with: techniques

Accelerometer Calibration

Cookie Robotics

https://cookierobotics.com › ...

Cookie Robotics

https://cookierobotics.com › ...

This page describes a method for calibrating low-g (~3g) three axis MEMS accelerometers . The method involves taking measurements at six different orientations. Read more

MEMS Accelerometers and Yearly Calibration

cbm connect

https://www.cbmconnect.com › mems-accelerometers-an...

cbm connect

https://www.cbmconnect.com › mems-accelerometers-an...

Jun 1, 2023 — The manufacturing process includes laser trimming to tighten tolerances and acts as a method of calibration , bringing the performance of the ... Read more

Calibrate accelerometers for industrial apps

ExRockets

http://www.blog.exrockets.com › uploads › 2012/05

ExRockets

http://www.blog.exrockets.com › uploads › 2012/05

PDF

by R Carver Cited by 7 — Developing a MEMS calibra- tion solution entails four steps: 1. Establish performance goals . 2. Determine calibration requirements. 3. Design calibration ... Read more

Scholarly articles for mems accelerometer calibration techniques
… calibration technique for mems accelerometer -based … - ‎ Zhu - Cited by 41 MEMS inertial sensor calibration technology: Current … - ‎ Ru - Cited by 147 … calibration method for low-cost mems accelerometer … - ‎ Hassan - Cited by 11

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Search Results

AI Overview

Calibrating DC MEMS Accelerometers with a Portable ...

Design and Analysis of MEMS Accelerometers

Selecting the Best Accelerometer for Your Test

Verifying MEMS Accelerometer Accuracy Without a Lab

An Improved Calibration Technique for MEMS Accelerometer ...

Calibrating MEMS DC Accelerometers

investigating mems accelerometer

Method for In-Field User Calibration of MEMS ...

Calibration of MEMS Accelerometer Based on Kalman ...

Accelerometer Calibration

MEMS Accelerometers and Yearly Calibration

Calibrate accelerometers for industrial apps

Scholarly articles for mems accelerometer calibration techniques

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