• Vacuum Packaging: The dominant method to mitigate gas damping (viscous damping), as structural damping is often negligible compared to gas damping at atmospheric pressure.
• Substrate Modification: Removing portions of the substrate directly underneath the moving proof mass minimizes slide-film damping, significantly increasing the
  

  $Q$
  -factor of driving and sensing modes.
• Structural Design & Optimization:
  • Thermoelastic Damping (TED): Controlled by optimizing the geometry and material properties of the resonating structure.
  • Anchor Loss Reduction: Minimizing energy loss through the suspension mechanism, which is critical for high-performance devices.
• Electrostatic Tuning: Using electrostatic voltages to tune the coupling stiffness and damping between different operating modes (e.g., in disk resonating gyroscopes ).
• Piezoresistive Sensing: Implementing highly doped monocrystalline silicon resistive beams to detect motion reduces dependence on parasitic capacitance, improving performance.

Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping

To obtain a large Coriolis force and a detectable signal in the sense mode, large quality factors in the drive and sense modes are...

National Institutes of Health (NIH) | (.gov)

Thermoelastic damping in MEMS gyroscopes at high ... - Nature

Jan 16, 2023 — The response of the corresponding high-frequency modes is, among other quantities, determined by their quality factors. At typical...

Nature

The analysis of damping in MEMS gyroscope

Jan 9, 2024 — Structural damping: it comes from inside the material of the mechanical structure of the watch movement and is mainly affected by ...

Ericco Inertial Technology

4m

50-kHz MEMS Gyroscopes Based on NEMS Sensing with 1.3 ...

YouTube · IEEE Sensors

Autonomous Calibration of MEMS Disk Resonating ...

Mar 28, 2008 — A. Two-level representation of the disk resonating gyroscope The wineglass mode gyroscope can be described as a two- level system ...

Autonomous Systems Laboratory

A Review of MEMS Vibrating Gyroscopes and Their Reliability ...

Sep 29, 2022 — where F D , F S , and F C are the driving, sensing, and Coriolis forces, respectively, m is the inertial mass, x is the displaceme...

National Institutes of Health (NIH) | (.gov)

Reliability of vacuum packaged MEMS gyroscopes

Feb 15, 2005 — To achieve a high Q-factor, MEMS gyroscopes must be packaged and operated in a vacuum where viscous and squeeze-film damping effec...

ScienceDirect.com