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Custom damping techniques in MEMS gyroscopes are specialized design and control methods used to manage the Quality factor (
Key custom damping techniques include:
1. Active Electrostatic Damping (Resistive Dampers)
- Principle: Resistive dampers, comprising capacitors and connected resistors, are incorporated into the drive and sense modes. As the structure vibrates, a current is induced in the plate capacitors, causing energy dissipation as heat through the resistors.
-
Adjustable Q-factor:
The damping magnitude can be regulated along the mode's vibration direction by adjusting the voltage (
), allowing for automatic-factor matching and eliminating up to 77% of resonance mismatches.
- Quadrature Reduction: Electrostatic dampers can be used to specifically suppress the undesired quadrature signal (a common error caused by fabrication imperfections), thereby enhancing the signal-to-noise ratio (SNR).
2. Geometrical Structural Damping
- Perforation Design: Viscous damping in MEMS devices can be managed by designing perforation geometries, such as cylindrical or trapezoidal holes in the proof mass. Trapezoidal holes, in particular, provide superior damping reduction with smaller surface area sacrifices.
-
Vertical Sense Mass (VSM):
A VSM approach can be used to improve
-factors by up to 8 times compared to conventional planar designs, often providing higher bandwidth and improved stability under, varied temperatures.
-
Optimized Suspension:
Double-folded flexures are designed to minimize mechanical stress near the anchor region, reducing energy losses and improving the mechanical
-factor.
3. Acoustic Metamaterials
- Acoustic Noise Reduction: To protect MEMS gyroscopes from high-frequency, high-power acoustic noise that can cause signal degradation, researchers use 1D arrays of Helmholtz resonators. These are fabricated using standard silicon processes and can be placed around the sensor to attenuate noise by as much as 18 dB.
4. Parametric Coupling Damping
- Modulating Stiffness: Parametric techniques can modulate the stiffness coupling between the drive and sense axes. By tuning the phase difference between the driving force and the parametric coupling, unwanted signals can be attenuated.
5. Damping Asymmetry Trimming
-
Thermal/Resistance Control:
To address frequency splits and mode-matching issues caused by asymmetry, resistors can be used to create controlled heat dissipation. Damping electrodes (e.g., at
orin ring gyros) can be used to adjust the damping axes specifically to reduce asymmetry.
6. Summary of Techniques
| Technique | Type | Application |
|---|---|---|
| Resistive Damper | Electrostatic |
Adjustable
|
| Perforations (Trapezoidal) | Structural | Viscous damping reduction |
| VSM Approach | Structural | Enhanced sensitivity/low noise |
| Helmholtz Resonator Array | Acoustic | High-frequency noise suppression |
| Parametric Coupling | Electrostatic | Quadrature error cancellation |
| Resistance Heat Tuning | Thermal | Damping asymmetry reduction |
These techniques allow for higher-precision MEMS gyroscopes, enabling performance improvements in consumer electronics and industrial navigation.
-
Amplification and damping in MEMS gyroscopes - ScienceDirectApr 15, 2012 — Either signal amplification or an attenuation of undesired signal components can be achieved by tuning the phase difference betwee...ScienceDirect.com
-
An automatic Q-factor matching method for eliminating 77% of the ...May 24, 2024 — Principle of the resistive damper. To enable adjustable damping for the MEMS DRG, we incorporate resistive dampers that consist of...Nature
-
Sound Attenuation Using MEMS Fabricated Acoustic ...May 6, 2012 — In recent years, a large amount of research has focused on the fascinating properties. found in metamaterials. A metamaterial is a...Auburn University
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Amplification and damping in MEMS gyroscopes
ScienceDirect.com
https://www.sciencedirect.com
› article › abs › pii
ScienceDirect.com
https://www.sciencedirect.com
› article › abs › pii
by M Sharma
2012
Cited by 91
—
This paper reports on parametric amplification and
damping
employed in a
MEMS gyroscope
. Experiments confirm that parametric modulation through electro- ...
Read more
MEMS Gyroscope Damping Analysis | Quanscient Allsolve
Quanscient
https://quanscient.com
› examples › mems-gyroscope-d...
Quanscient
https://quanscient.com
› examples › mems-gyroscope-d...
Optimize MEMS gyroscope performance with fully coupled damping analysis
. Predict quality factors accurately using cloud-native multiphysics simulation.
PARAMETRIC AMPLIFICATION/DAMPING IN MEMS ...
Purdue University
https://engineering.purdue.edu
› PDFs › Papers
Purdue University
https://engineering.purdue.edu
› PDFs › Papers
PDF
by M Sharma
Cited by 32
—
The proposed parametric electro-mechanical
technique
can be used for amplifying the Coriolis coupling and
damping
the undesired quadrature coupling. This ...
Read more
4 pages
The analysis of damping in MEMS gyroscope
Ericco Inertial Technology
https://www.ericcointernational.com
› application › the-...
Ericco Inertial Technology
https://www.ericcointernational.com
› application › the-...
Jan 9, 2024
—
The damping of MEMS gyro core structure is mainly composed of the following two aspects: Structural damping: it comes from inside the material ...
Read more
(820)
Scholarly articles for custom damping techniques in mems gyroscopes |
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… of decoupled 3-DoF robust
MEMS gyroscope
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Riaz
- Cited by 38
Environmentally robust
MEMS
vibratory
gyroscopes
for …
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Acar
- Cited by 185
… and challenges of ovenized
MEMS gyroscopes
: A …
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Wang
- Cited by 72
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Use of MEMS Gyroscopes in Active Vibration Damping for ...
Università di Padova
https://automatica.dei.unipd.it
› utenti › iecon2011
Università di Padova
https://automatica.dei.unipd.it
› utenti › iecon2011
PDF
by R Antonello
Cited by 3
—
In this paper, we propose the extension of the proposed
technique
, with the use of a
MEMS gyroscope
to implement an active
damping
control strategy, which ...
Read more
Sound Attenuation Using MEMS Fabricated Acoustic ...
Auburn University
https://etd.auburn.edu
› Yunker_Thesis_Final
Auburn University
https://etd.auburn.edu
› Yunker_Thesis_Final
PDF
by W Yunker
2012
Cited by 4
—
This is because fluidic
damping
is minimized in
MEMS gyroscopes
due to vacuum packaging [20]. One of the problems in
MEMS gyroscopes
measuring ...
Read more
Design, Analysis, and Simulation of a MEMS Tuning Fork ...
National Institutes of Health (NIH) | (.gov)
https://pmc.ncbi.nlm.nih.gov
› articles › PMC11857292
National Institutes of Health (NIH) | (.gov)
https://pmc.ncbi.nlm.nih.gov
› articles › PMC11857292
by H Hu
2025
Cited by 4
—
This paper describes a novel micro-electro-mechanical system (
MEMS
) tuning fork
gyroscope
(TFG) design that employs a chevron-shaped displacement mechanism.
Read more
fork gyroscope
Zurich Instruments
https://www.zhinst.com
› sites › default › files
Zurich Instruments
https://www.zhinst.com
› sites › default › files
PDF
by J Reddy
Cited by 4
—
The performance of a
MEMS gyroscope
structure in high vacuum environment is limited mostly by anchor losses and thermoelastic
damping
. In vacuum ...
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Design and Modelling of MEMS Vibrating Internal Ring ...
MDPI
https://www.mdpi.com
› ...
MDPI
https://www.mdpi.com
› ...
by WA Gill
2024
Cited by 4
—
To design a
MEMS
vibrating ring
gyroscope
, a consideration of thermoelastic
damping
is quite important. This
method
involves thermal expansion and mechanical ...
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Design and Analysis of MEMS Gyroscopes
YouTube · Diego Emilio Serrano
1.2K+ views · 3 years ago
YouTube · Diego Emilio Serrano
1.2K+ views · 3 years ago
Today I'm going to be discussing some of the details on the design and Analysis of men's gyroscopes.
