The aim of the course is to introduce the basic concepts of various types of electronic devices which allow to acquire physical, chemical and biological ... Read more

by R Grundbacher · 2008 · Cited by 14 — Students participating in the MEMSlab course learn the operational principles of comb-structure accelerometers , as well as how to fabricate, ... Read more

MEMS stands for micro electro mechanical system and applies to any sensor manufactured using microelectronic fabrication techniques.

Hands-On Workshop : Introduction to MEMS design software for simulating MEMS ... Wearable MEMS systems: MEMS accelerometers, gyroscopes, and biosensors. Read more

Workshop . Schedule: Once a quarter (January, April, September, October). Time: 9:00 to 15:00. Place: Fukuchi No.2 factory in Aomori prefecture. Read more

by DE Serrano · Cited by 15 — High-performance micromachined accelerometers . – Same fabrica7on platorm as gyroscopes → size & cost advantage. Read more

MEMS -based gravity instruments are now being developed for applications such as geotechnical surveying, planetary exploration, and CO2 storage ... Read more

by J Lainé · Cited by 142 — A new generation of accelerometers based on a microelec- tromechanical system ( MEMS ) can deliver broadband (0 to. 800 Hz) and high-fidelity measurements of ... Read more