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Novel approach to nanosecond laser drilling of a crack-free ...
ScienceDirect.com
https://www.sciencedirect.com › science › article › pii
ScienceDirect.com
https://www.sciencedirect.com › science › article › pii
by L Bustamante2025Cited by 5 — Our study focuses on the precision and efficiency of nanosecond laser drilling in silicon carbide (SiC) wafers, particularly for applications in electronics ...Read more
Silicon Wafer Hole Drilling,UV Lasers And Green ...
RFH Laser
https://www.rfhtech.com › blog › silicon-wafer-hole-drill...
RFH Laser
https://www.rfhtech.com › blog › silicon-wafer-hole-drill...
Jan 14, 2021 — Drilling ceramic using laser energy allows for fast drilling while having precise control of heat, hole placement, and hole quality. Drilling ...Read more
UV laser drilling of SiC for semiconductor device fabrication
IOPscience
https://iopscience.iop.org › article
IOPscience
https://iopscience.iop.org › article
by O Krüger2007Cited by 21 — Pulsed UV laser processing is used to drill micro holes in silicon carbide (SiC) wafers supporting AlGaN/GaN transistor structures. Direct laser ablation ...Read more
(PDF) Micro Drilling of Silicon Wafer by Industrial CO2 Laser
ResearchGate
https://www.researchgate.net › ... › Silicon Wafer
ResearchGate
https://www.researchgate.net › ... › Silicon Wafer
Aug 9, 2025 — Laser drilling is a popular method as it eliminates the problem of chatter and vibration due to the absence of physical contact between the tool ...Read more
Ultrahigh-speed laser drilling of transparent materials via ...
Science | AAAS
https://www.science.org › Science Advances › Research
Science | AAAS
https://www.science.org › Science Advances › Research
by Y Zhang2025Cited by 7 — We demonstrate that by transiently exciting electrons in a transparent material, the laser drilling speed is increased by a factor of 1 million.Read more
Laser Drilling of Microholes in Single Crystal Silicon Using ...
University of Nottingham
https://eprints.nottingham.ac.uk › ...
University of Nottingham
https://eprints.nottingham.ac.uk › ...
PDF
by JO MacleanCited by 10 — The laser microdrilling of via holes in Si semiconductor wafers was stud- ied using 1 ms pulses from an Yb fibre laser with 1070 nm wavelength.Read more
Laser Micro Drilling
SuperbIN Co. Ltd.
https://www.superbin.com.tw › applications › laser-micr...
SuperbIN Co. Ltd.
https://www.superbin.com.tw › applications › laser-micr...
Laser technology has advanced in drilling hole production due to non-contact processing, precise metering of energy input, minimal heat transfer to the material ...Read more
Femtosecond laser drilling of high-aspect-ratio 1-micron ...
SPIE Digital Library
https://www.spiedigitallibrary.org › 12.482107.full
SPIE Digital Library
https://www.spiedigitallibrary.org › 12.482107.full
by DR Alexander2002Cited by 3 — In this work, the femtosecond laser nanomachining facilities at the University of Nebraska is discussed to drill 1 micrometers holes in Si/SiO2 with aspect ...Read more
Laser helical drilling of silicon wafers with ns to fs pulses
AIP.ORG
https://pubs.aip.org › lia › jla › article › Laser-helical-dr...
AIP.ORG
https://pubs.aip.org › lia › jla › article › Laser-helical-dr...
The primary aim of the present work is to investigate how the mechanisms of material removal and redeposition change when the pulse width is systematically ...Read more
