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UV curing systems for wafer film are specialized, high-intensity 365nm UV-LED or mercury lamp systems designed to reduce tape adhesion after dicing for safe, easy die pick-up. These systems, like the Powatec U-300 and Ultron UH104-8, typically feature conveyor or drawer loading for 8-inch or 12-inch wafers, utilizing UV-A light to instantly or rapidly cure tapes while minimizing damage to fragile, small die structures, with optional nitrogen purging to prevent oxygen inhibition.
Key Features and Benefits
- Targeted Curing: Specifically designed to reduce tape adhesion after wafer dicing to facilitate die picking.
- High-Intensity UV-LEDs: Most modern systems use 365 nm UVA LEDs, providing instant operation, long lifetime, and energy efficiency.
- Uniformity: Systems ensure a consistent energy distribution (often ) across the wafer to ensure even curing.
- Process Control: Adjustable dosage (to) is available, often with programmable settings for different tape types.
- Environmental & Safety: LED systems do not generate ozone or dangerous mercury gas.
- Optional Nitrogen Purge: Used to reduce oxygen inhibition, which can interfere with the curing process.
Popular Models and Manufacturers
- POWATEC: Offers models like the U-200 (8-inch), U-300 (12-inch, 300mm), and U-450 (16-inch) featuring LED, conveyor-fed, and optional nitrogen purge systems.
- Ultron Systems, Inc.: Known for the UH104 Series, a compact desktop system for up to 8-inch wafers.
- UVfab: Provides the UVC-300 and UVC-408 (200mm) with nitrogen purge and high-pressure mercury or LED sources.
This video demonstrates the operation of a UV curing system for wafer film:
Common Applications
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Web results
UV Curing Systems - Model UH104 Series
Ultron Systems
https://www.ultronsystems.com › USI-ProdUVCuring
Ultron Systems
https://www.ultronsystems.com › USI-ProdUVCuring
The Model UH105 Series LED UV Curing System is our newest product for highly efficient and cost-effective wafer curing. LED light-curing technology offers ...Read more
UV-LED Curing System for up to 300 mm Wafers, Model UVC ...
uvfab.com
https://www.uvfab.com › UV Curing Systems
uvfab.com
https://www.uvfab.com › UV Curing Systems
The model UVC-300 can process up to 300mm (12 inches) wafers using LED (Light Emitting Diode) UV Lights and is equipped with a nitrogen purge function.Read more
High Power 6'' 8'' 12'' UV Wafer Tape Curing Systems ...
Shenzhen Deshengxing Electronics Co., Ltd.
https://www.leduvcuring.com › high-power-6-8-12-uv-...
Shenzhen Deshengxing Electronics Co., Ltd.
https://www.leduvcuring.com › high-power-6-8-12-uv-...
Curing multiple 6 inches UV Wafer at the same time, UV Film Tape Curing Systems reduce the adhesive strength of all UV-sensitive dicing tapes under controlled ...Read more
Standard UV Curing System U-450 - Hünenberg
Powatec
https://www.powatec.com › products › uv-led-curing-sys...
Powatec
https://www.powatec.com › products › uv-led-curing-sys...
Manual UV Curing System U-450 · Large curing area able to handle one 450mm wafer with frame or four 8" wafers with frame · Energy dose from 80 - 2400 mJ/cm ...Read more
DSXUV-Tape-8 8inch UV Tape Curing Systems Wafer ...
eBay
https://www.ebay.com › itm
eBay
https://www.ebay.com › itm
UV Tape Curing Systems reduce the adhesive strength of all. Application: Reduce UV tape stickness. Processing Machine With Touch Screen Operation Systems.
$2,800.00In stock$7.95 delivery
Curing UV tape after dicing - DICING OF SUBSTRATES
microworld.eu
https://www.microworld.eu › curing-uv-tape-after-dicin...
microworld.eu
https://www.microworld.eu › curing-uv-tape-after-dicin...
Benchtop low-profile system, the UH104 offers an exceptional flexibility and repeatability in the curing of UV films for dicing or backgrinding.Read more
UV Curing System - Micro/Nanofabrication Center
Princeton University
https://mnfc.princeton.edu › tool-list › uv-curing-system
Princeton University
https://mnfc.princeton.edu › tool-list › uv-curing-system
Ultron Systems Model UH104-8 UV Curing System is used for low temperature UVA 365 nm curing of up to 8″ (200 mm) ULTRON 1020R-9.0 plastic film frame-mounted ...Read more
6/8/10/12 inch wafer chip uv film debonding machine
futansi-uv.com
https://www.futansi-uv.com › scanned-uv-deboing-mac...
futansi-uv.com
https://www.futansi-uv.com › scanned-uv-deboing-mac...
A UV debonding machine is a specialized device designed for the controlled and precise debonding or separation of materials using ultraviolet light technology.Read more
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