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Did you mean: 193 nm UV Vacuum Ultraviolet Series

AI Overview

193nm Vacuum Ultraviolet (VUV) technology spans advanced applications including lithography, material degradation studies, and high-resolution spectroscopy. As part of the DUV/VUV spectrum, 193nm radiation is crucial for high-precision processing, such as photoresist ablation in semiconductor manufacturing and molecular research.

Key Aspects of 193nm VUV Applications

Semiconductor Lithography & Research: 193 nm laser sources are the backbone of photolithography. Research explores 193 nm photoresist exposure to analyze plasma-induced surface roughening (LWR) and degradation.
Laser Systems: Specialized laser systems, such as those using KBBF crystals, generate 193 nm coherent light through harmonic generation for spectroscopy and precision applications.
Photolysis and Chemical Analysis: 193 nm is widely used in photolysis studies to measure quantum yields and investigate atmospheric processes, such as the decomposition of halogenated compounds.
Detectors and Instrumentation: VUV detectors (typically in the 120-400nm range) use VUV radiation for identification of substances, while specific 193 nm immersion photodetectors based on AlN semiconductors are developed for high-sensitivity VUV detection.

Synergistic effects of vacuum ultraviolet radiation, ion bombardment, ...
Synergistic effects of vacuum ultraviolet radiation, ion bombardment, and heating in 193 nm photoresist roughening and degradation...
Princeton University
193 nm immersion photodetector with an ultra-high EQE of 83.7%
Under an excitation with lower light power (45 nW), its EQE can reach 83.7%. The VUV immersion detector based on the semiconductor...
ScienceDirect.com
Absolute vacuum ultraviolet flux in inductively coupled plasmas and ...
Apr 27, 2009 — We propose an alternative method of estimating the VUV flux to substrate surfaces by monitoring the chemical changes in 193 nm PR ...
AIP Publishing
Vacuum Ultraviolet Laser-Induced Fluorescence Detection of O(1S ...
Oct 11, 2003 — A new high-sensitive direct detection technique for O(1S) atoms using a vacuum ultraviolet (VUV) laser system developed in this st...
ACS Publications
Plasma impact on 193 nm photoresist linewidth roughness
Mar 12, 2009 — No bias power is applied to the substrate implying that ion energy is about 15 eV. The ex- periments are carried out in an inducti...
AIP Publishing
Vacuum ultraviolet spectrum and quantum yield of the 193 nm ...
Cited by (3) * Theoretical studies on carbonyl halide-water complexes. 2004, Chemical Physics. In the stratosphere, photodissociat...
ScienceDirect.com
Vacuum ultraviolet light generation at 193 nm by quasi- ...
By use of KBe 2 BO 3 F 2 (KBBF) crystal with a size of 10 mm × 10 mm × 1.2 mm and a special prism-coupling technique (PCT), fourth...
ResearchGate

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VUV Customized Polarizers for Laser @193nm

Fuzhou MT Optics,Inc.

https://www.mt-optics.net › category › vuv-customized-p...

Fuzhou MT Optics,Inc.

https://www.mt-optics.net › category › vuv-customized-p...

The VUV Customized Polarizers for Laser series operates at a wavelength of 193.368nm, covering a wavelength range of 160 - 250nm. This series includes VUV Thin ...Read more

193 nm immersion photodetector with an ultra-high EQE of ...

ScienceDirect.com

https://www.sciencedirect.com › article › abs › pii

ScienceDirect.com

https://www.sciencedirect.com › article › abs › pii

by Z Lin2024Cited by 14 — An immersion detector with rapid response to 193 nm VUV light was prepared using AlN/n-SiC substrate as the photoelectrode.Read more

VUV and Deep Ultraviolet Spectrometer

McPherson, Inc.

https://mcphersoninc.com › vuvuvvis › model234302

McPherson, Inc.

https://mcphersoninc.com › vuvuvvis › model234302

Use the Monarch monochromator for any deep UV or vacuum ultraviolet application. The compact housing is easily adapted to most experiments. Microchannel plate ...Read more

Vacuum ultraviolet light generation at 193 nm by quasi- ...

SPIE Digital Library

https://www.spiedigitallibrary.org › 12.874130.full

SPIE Digital Library

https://www.spiedigitallibrary.org › 12.874130.full

by M Harada2011Cited by 2 — Vacuum ultraviolet 193.4 nm light of 17 mW was generated from 177 mW fundamental light. To the best of our knowledge, this is the shortest ...Read more

Research Progresses on Vacuum-Ultraviolet 193-nm Band ...

researching.cn

https://www.researching.cn › articles

researching.cn

https://www.researching.cn › articles

The development status of vacuum-ultraviolet (VUV) solid-state 193-nm laser sources is reviewed in this paper, including the related nonlinear crystals ...Read more

VUV-VASE Ellipsometer

J.A. Woollam

https://www.jawoollam.com › Products

J.A. Woollam

https://www.jawoollam.com › Products

The VUVVASE provides excellent characterization capabilities at 193 nm (6.42 eV) for current lithography applications because data can be collected surrounding ...Read more

Simulated Space Vacuum Ultraviolet (VUV) Exposure ...

NASA (.gov)

https://ntrs.nasa.gov › api › citations › downloads

NASA (.gov)

https://ntrs.nasa.gov › api › citations › downloads

PDF

by JA Dever2002Cited by 56 — For wavelengths of 200 nm and below, there is significantly greater attenuation of the. VUV radiation for the same thickness of FEP as compared to longer ...Read more

14 pages

Absolute vacuum ultraviolet flux in inductively coupled ...

AIP Publishing

https://pubs.aip.org › aip › apl › article › Absolute-vacu...

AIP Publishing

https://pubs.aip.org › aip › apl › article › Absolute-vacu...

Apr 27, 2009 — We propose an alternative method of estimating the VUV flux to substrate surfaces by monitoring the chemical changes in 193 nm PR induced by VUV ...Read more

VUV Excimer Lamp Irradiation sysytem 126nm 172nm ...

株式会社クォークテクノロジー

http://www.quark-tec.com › english › tech

株式会社クォークテクノロジー

http://www.quark-tec.com › english › tech

VUV irradiations are 3 times compared with the current product. VUV uniformity are 5 times(±5%) compared with the current product. The use of the vacuum process ...Read more

Vacuum Ultraviolet Laser-Induced Fluorescence Detection of ...

ACS Publications

https://pubs.acs.org › doi