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Electrostatic chuck AlN ceramic
Fujian Huaqing Electronic Material Technology Co.,Ltd
https://www.huaqingcn.com › electrostatic-chuck-aln-cer...
Fujian Huaqing Electronic Material Technology Co.,Ltd
https://www.huaqingcn.com › electrostatic-chuck-aln-cer...
1.Material:Aluminum Nitride. 2.Function:Insulation and heat dissipation ceramic. 3.Type:Ceramic. 4.Color:Gray. 5.Can be customed:yes,please provide drawings for ...Read more
Electrostatic Chuck (Al2O3, AlN, Sapphire) | SAM
Stanford Advanced Materials
https://www.samaterials.com › electrostatic-chuck
Stanford Advanced Materials
https://www.samaterials.com › electrostatic-chuck
Electrostatic Chuck features high purity, high plasma durability, good chucking/de-chucking response and high temperature and low temperature application.
Starting from $100.00
Electrostatic chuck | Product information
株式会社NTKセラテック
https://www.ceratech.co.jp › product › esc
株式会社NTKセラテック
https://www.ceratech.co.jp › product › esc
Electrostatic chucks and ceramic heaters can be produced by sintering materials with metallic electrodes arranged in the ceramics.Read more
Aluminum Nitride Materials Wafer Electrostatic Chucks ...
Valuates Reports
https://reports.valuates.com › Market Reports
Valuates Reports
https://reports.valuates.com › Market Reports
Jun 23, 2025 — The global market for Aluminum Nitride Materials Wafer Electrostatic Chucks was valued at US$ 149 million in the year 2024 and is projected ...Read more
Modeling and simulation of heat transfer characteristics ...
IEEE
https://ieeexplore.ieee.org › document
IEEE
https://ieeexplore.ieee.org › document
by KC Hsu2015Cited by 9 — This study observes the heat transfer characteristics of the wafer on the AlN and Al 2 O 3 electrostatic chuck (ESC), which were utilized under the various ...Read more
E-Chucks & Heaters
KemaTek Technical Ceramics
https://kematek-en.com › Products
KemaTek Technical Ceramics
https://kematek-en.com › Products
Wafer Processing Electrostatic Chucks (ESC) & Heaters KemaTek manufactures heater and ESC aluminum nitride components and refurbishes used ESCs.Read more
ESC Electrostatic Chuck
Semixicon
https://www.semixicon.com › ESC-Electrostatic-Chuck
Semixicon
https://www.semixicon.com › ESC-Electrostatic-Chuck
ESC Electrostatic Chuck Overview: ESC Electrostatic Chuck, Standard SEMIXICON design for 4, 6,8,12 inch silicon wafer or customization.Read more
US9001489B2 - Electrostatic chuck AlN dielectric repair
Google Patents
https://patents.google.com › patent
Google Patents
https://patents.google.com › patent
The present invention generally relates to a refurbished electrostatic chuck and a method of refurbishing a used electrostatic chuck.Read more
AL3258 Electrostatic Chuck (Al2O3, AlN, Sapphire)
Advanced Ceramic Materials
https://www.preciseceramic.com › products › electrostat...
Advanced Ceramic Materials
https://www.preciseceramic.com › products › electrostat...
Electrostatic Chuck features high purity, high plasma durability, good chucking/de-chucking response, and high-temperature and low-temperature application.
Plasma Effects on Electrostatic Chuck Characteristics on ...
プラズマ・核融合学会
https://www.jspf.or.jp › PDF › pfr2007_02-044
プラズマ・核融合学会
https://www.jspf.or.jp › PDF › pfr2007_02-044
PDF
by S Gyu IlCited by 13 — When a thin Al foil is inserted between the Si wafer and the aluminum nitride (AlN) spacer layer, the chuck current recovers upto the reference value, ...Read more
