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Silicon Carbide Trays | Advanced Ceramics | Edgetech Industries

Silicon carbide (SiC) ICP trays are high-purity, corrosion-resistant wafer carriers designed for inductively coupled plasma (ICP) etching, specifically in LED and semiconductor manufacturing . These trays offer exceptional thermal stability (up to 1400°C+), uniform heating, and chemical resistance to harsh cleaning processes, ensuring high-quality, consistent, and particle-free etching.

Key Features of Silicon Carbide ICP Trays:

High Purity and Corrosion Resistance: Manufactured from high-purity SiC or CVD-coated graphite/ceramic, they withstand corrosive plasma environments and prevent impurities.
Thermal Management: With high thermal conductivity and low thermal expansion, these trays provide consistent temperature distribution and thermal shock resistance during rapid temperature changes.
Dimensional Stability: The high strength of SiC ensures the tray remains stable and resistant to warping or cracking under intense heat and vacuum conditions.
Applications: Specifically used as susceptors and wafer carriers for 4-inch to 6-inch wafers during ICP etching, PVD, and other epitaxial growth processes in LED production.

Key Providers and Types:

Semicorex : Offers CVD-coated SiC carriers on graphite for high-temperature plasma, specializing in particle reduction and even heating Semicorex .
CS Ceramic : Produces high-purity SiC trays suitable for semiconductor RTA, PVD, and ICP applications CS Ceramic Co.,Ltd .
Mascera / Atcera / Xinkehui : Offer various customized high-purity SiC ceramic tray plates for 4/6-inch wafer handling XIAMEN MASCERA TECHNOLOGY CO.,LTD. .

These trays are favored for improving production yield in high-heat manufacturing, despite being more expensive than traditional materials like graphite or alumina Moat City .

Advanced Customized ICP Plasma Etching Tray - Semicorex
Send Inquiry. ... Our ICP plasma etching tray is silicon carbide coated using CVD method, which is the ideal solution for wafer ha...

Semicorex
China Silicon Carbide Ceramic Manufacturers
Sic Silicon Carbide Ceramic Tray Plates For Icp Etching The wafer carriers utilized in epitaxial growth processes are subjected to...

XIAMEN MASCERA TECHNOLOGY CO.,LTD.
High-Purity SiC Tray for Semiconductor RTA PVD ICP CMP Processes
Properties of SiC Silicon Carbide Tray With a low thermal expansion coefficient, it maintains dimensional stability, reducing the ...

CS Ceramic Co.,Ltd

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High-Purity SiC Tray for Semiconductor RTA PVD ICP CMP ...

CS Ceramic Co.,Ltd

https://www.csceramic.com › Silicon Carbide Plate

CS Ceramic Co.,Ltd

https://www.csceramic.com › Silicon Carbide Plate

The high-purity silicon carbide tray, formed through sintering, serves as a durable carrying device in semiconductor manufacturing processes like RTA, PVD, ICP, ... Read more

Silicon carbide ICP tray from www.csceramic.com

Silicon Carbide Trays | Edgetech Industries

eticeramics.com

https://www.eticeramics.com › products › silicon-carbide...

eticeramics.com

https://www.eticeramics.com › products › silicon-carbide...

It is mainly used in the ICP etching process of epitaxial layer thin film materials (GaN, SiO2, etc.) of LED wafer chips, precision ceramic parts for ... Read more

Silicon carbide ICP tray from www.eticeramics.com

Silicon carbide ICP tray manufacturers ...

HUNAN ATCERA CO.,LTD

https://www.atcera.com › silicon-carbide-icp-tray_sp

HUNAN ATCERA CO.,LTD

https://www.atcera.com › silicon-carbide-icp-tray_sp

ATCERA manufactures various types of Silicon carbide ICP tray . We provide customized & OEM service as you required!

Sic Silicon Carbide Ceramic Tray Plates For Icp Etching

XIAMEN MASCERA TECHNOLOGY CO.,LTD.

https://www.mascera-tec.com › product › sic-silicon-car...

XIAMEN MASCERA TECHNOLOGY CO.,LTD.

https://www.mascera-tec.com › product › sic-silicon-car...

Mascera offers high-purity silicon carbide ceramic tray plates that provide exceptional heat resistance, uniform thermal distribution for consistent epi layer ... Read more

Silicon carbide ICP tray from www.mascera-tec.com

Advanced Customized Silicon Carbide ICP Etching Carrier

Semicorex

https://www.semicorex.com › ... › ICP Etching Carrier

Semicorex

https://www.semicorex.com › ... › ICP Etching Carrier

Look no further than Semicorex's Silicon Carbide ICP Etching Carrier . Our product is engineered to withstand high temperatures and harsh chemical cleaning. Read more

Silicon carbide ICP tray from www.semicorex.com

SiC Pin Trays for ICP Etching Processes in the LED Industry

Semicera Semiconductor

https://www.semi-cera.com › icppss-etching-disc-product

Semicera Semiconductor

https://www.semi-cera.com › icppss-etching-disc-product

Semicera's SiC Pin Trays for ICP Etching Processes in the LED Industry are specifically designed to enhance efficiency and precision in etching applications .

Silicon Carbide Trays SiC Wafers Tray Plate For ICP ...

sapphire-substrate.com

https://www.sapphire-substrate.com › ... › Ceramic Parts

sapphire-substrate.com

https://www.sapphire-substrate.com › ... › Ceramic Parts

High quality Silicon Carbide Trays SiC Wafers Tray Plate For ICP Etching MOCVD Susceptor Wear Resistant from China, China's leading product market Ceramic ...

Silicon carbide ICP tray from www.sapphire-substrate.com

Semiconductor Ceramic LED Silicon Carbide ICP Etching ...

3X Ceramic Parts

https://www.3xceramicparts.com › semiconductor-ceramics

3X Ceramic Parts

https://www.3xceramicparts.com › semiconductor-ceramics

Semiconductor Ceramic LED Silicon Carbide ICP Etching Disk ; Specification: custom make ; Shape: round ; Hardness: 2800 kg/mm2 ; Density: 3.12 gm/cc ; Max working ... Read more

Silicon carbide ICP tray from www.3xceramicparts.com

Silicon Carbide Ceramic Tray for LED Wafer Epitaxy and ICP ...

shanghai famous trade co.,ltd

https://www.galliumnitridewafer.com › video-375857-s...

shanghai famous trade co.,ltd

https://www.galliumnitridewafer.com › video-375857-s...

The tray offers high purity, chemical inertness, stable mechanical properties under extreme conditions , excellent wear resistance, and lightweight durability.

Analyzing the ICP Etching Silicon Carbide Tray Market

1 month ago

ICP etching of silicon carbide trays is a crucial process in semiconductor manufacturing, enhancing device performance and efficiency. Companies ... Read more

The Main Advantages and Disadvantages of Silicon Carbide ...

https://www.linkedin.com › pulse › main-advantages-dis...

How much does a SiC wafer cost?

A 200mm SiC wafer might cost $1,500 to produce and weigh 50-grams , yielding an effective cost of $30M/ton of SiC contained, or $10M/ton of SiC consumed (assuming 2/3 material losses during formation/wafering).

Silicon carbide production costs? - Thunder Said Energy

Thunder Said Energy

https://thundersaidenergy.com › downloads › silicon-car...

Thunder Said Energy

https://thundersaidenergy.com › downloads › silicon-car...

What is the difference between 3C SiC and 4H SiC?

3C-SiC is suitable for high-frequency and high-power devices due to its high saturated electron drift speed. 4H-SiC has become an ideal choice for power electronic devices due to its high electron mobility, low on-resistance and high current density. Mar 25, 2024

Differences between SiC crystals with different structures - News

Semicorex

https://www.semicorex.com › news-show-3658

Semicorex

https://www.semicorex.com › news-show-3658

What is the difference between SSiC and SiC?

Sintered Silicon Carbide (SSiC) Applications:

The primary difference between SiC Wafer and Sintered Silicon Carbide (SSiC) lies in their crystal structure, electrical conductivity, and application areas . SiC Wafer is a single-crystal material used in semiconductor power electronics and RF devices. Mar 13, 2025

Difference Between SiC Wafer and Sintered Silicon Carbide (SSiC)

XIAMEN MASCERA TECHNOLOGY CO.,LTD.

https://www.mascera-tec.com › news › difference-betwee...

XIAMEN MASCERA TECHNOLOGY CO.,LTD.

https://www.mascera-tec.com › news › difference-betwee...

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Scholarly articles for Silicon carbide ICP tray
Analysis of silicon carbide powder by ETV- ICP -AES - ‎ Záray - Cited by 42 ICP -AES detection of silicon carbide impurities … - ‎ Záray - Cited by 39 … high purity graphite and silicon carbide by direct solid … - ‎ Schäffer - Cited by 38

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AI Overview

High-Purity SiC Tray for Semiconductor RTA PVD ICP CMP ...

Silicon Carbide Trays | Edgetech Industries

Silicon carbide ICP tray manufacturers ...

Sic Silicon Carbide Ceramic Tray Plates For Icp Etching

Advanced Customized Silicon Carbide ICP Etching Carrier

SiC Pin Trays for ICP Etching Processes in the LED Industry

Silicon Carbide Trays SiC Wafers Tray Plate For ICP ...

Semiconductor Ceramic LED Silicon Carbide ICP Etching ...

Silicon Carbide Ceramic Tray for LED Wafer Epitaxy and ICP ...

Analyzing the ICP Etching Silicon Carbide Tray Market

The Main Advantages and Disadvantages of Silicon Carbide ...

Silicon carbide production costs? - Thunder Said Energy

Differences between SiC crystals with different structures - News

Difference Between SiC Wafer and Sintered Silicon Carbide (SSiC)

Scholarly articles for Silicon carbide ICP tray

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