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Vacuum Ultraviolet (VUV) 193 nm technology, often utilizing ArF excimer lasers, is critical for advanced photolithography, material analysis, and photoresist processing. It operates in the 100–200 nm range, often requiring specialized optics (e.g., CaF2 or MgF2) and nitrogen purging to prevent atmospheric absorption.
Key aspects include:
- Photolithography: 193 nm immersion lithography is standard for high-resolution semiconductor manufacturing.
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Web results
193 nm immersion photodetector with an ultra-high EQE of ...
ScienceDirect.com
https://www.sciencedirect.com › article › abs › pii
ScienceDirect.com
https://www.sciencedirect.com › article › abs › pii
by Z Lin2024Cited by 14 — An immersion detector with rapid response to 193 nm VUV light was prepared using AlN/n-SiC substrate as the photoelectrode.Read more
Vacuum ultraviolet light generation at 193 nm by quasi- ...
SPIE Digital Library
https://www.spiedigitallibrary.org › 12.874130.full
SPIE Digital Library
https://www.spiedigitallibrary.org › 12.874130.full
by M Harada2011Cited by 2 — Vacuum ultraviolet 193.4 nm light of 17 mW was generated from 177 mW fundamental light. To the best of our knowledge, this is the shortest ...Read more
VUV Customized Polarizers for Laser @193nm
Fuzhou MT Optics,Inc.
https://www.mt-optics.net › category › vuv-customized-p...
Fuzhou MT Optics,Inc.
https://www.mt-optics.net › category › vuv-customized-p...
The VUV Customized Polarizers for Laser series operates at a wavelength of 193.368nm, covering a wavelength range of 160 - 250nm. This series includes VUV Thin ...Read more
Research Progresses on Vacuum-Ultraviolet 193-nm Band ...
researching.cn
https://www.researching.cn › articles
researching.cn
https://www.researching.cn › articles
The development status of vacuum-ultraviolet (VUV) solid-state 193-nm laser sources is reviewed in this paper, including the related nonlinear crystals ...Read more
Deep UV, Vacuum UV Optics and Crystals
Shalom EO
https://www.shalomeo.com › Deep-UV-Vacuum-UV-O...
Shalom EO
https://www.shalomeo.com › Deep-UV-Vacuum-UV-O...
Deep Ultraviolet (DUV) refers to the UV spectrum located between 193-248nm, and Vacuum Ultraviolet (VUV) means the wavelength range between 150-200nm.
Ion and vacuum ultraviolet photon beam effects in 193nm ...
Princeton University
https://collaborate.princeton.edu › publications › ion-an...
Princeton University
https://collaborate.princeton.edu › publications › ion-an...
Previous studies have identified a synergistic effect of ion bombardment, vacuum ultraviolet (VUV) radiation, and moderate substrate heating in 193nm ...
Scholarly articles for Vacuum Ultraviolet Series 193nm | |
Vacuum ultra violet absorption spectroscopy of 193 nm … - ‎Fouchier - Cited by 24 Characteristics of deep-UV optics at 193 nm and 157 … - ‎Callahan - Cited by 23 Synergistic effects of vacuum ultraviolet radiation, ion … - ‎Nest - Cited by 86 | |
Web results
Vacuum ultraviolet light generation at 193 nm by quasi- ...
Harvard University
https://ui.adsabs.harvard.edu › abs › abstract
Harvard University
https://ui.adsabs.harvard.edu › abs › abstract
by M Harada2011Cited by 2 — Coherent all-solid-state light source of a wavelength below 200nm is attracting a lot of attention for industrial applications such as semiconductor processing, ...Read more
Simulated Space Vacuum Ultraviolet (VUV) Exposure ...
NASA (.gov)
https://ntrs.nasa.gov › api › citations › downloads
NASA (.gov)
https://ntrs.nasa.gov › api › citations › downloads
PDF
by JA Dever2002Cited by 56 — Vacuum ultraviolet. (VUV) radiation of wavelengths between. 115 and 200 nm produced by the sun in the space environ- ment can cause degradation to polymer films ...Read more
Measurements of Refraction in the Deep and Vacuum ...
National Institute of Standards and Technology (.gov)
https://www.nist.gov › publications › measurements-ref...
National Institute of Standards and Technology (.gov)
https://www.nist.gov › publications › measurements-ref...
by JH Burnett2008Cited by 1 — Measurements of the indices of fused silica and calcium fluoride near 193 nm, with a fractional accuracy of 7 ppm, are discussed. These ...Read more
Electron, ion and vacuum ultraviolet photon effects in 193 ...
IOPscience
https://iopscience.iop.org › article
IOPscience
https://iopscience.iop.org › article
by TY Chung2010Cited by 34 — We present measurements of 193 nm PR surface roughness following exposure to 1 keV electron beams in various combinations with positive ion and vacuum ...Read more