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    Web results

    Aluminum Nitride Electrostatic Chuck | Edgetech Industries


    eticeramics.com
    https://www.eticeramics.com › products › aluminum-nitri...
    eticeramics.com
    https://www.eticeramics.com › products › aluminum-nitri...
    Edgetech Industries, Advanced Ceramics Division supplies high-quality Aluminum nitride (AlN) Ceramics Electrostatic Chuck at competitive price.Read more

    Aluminum Nitride Ceramic Electrostatic Chuck


    Atcera.com
    https://www.atcera.com › Aluminum Nitride Ceramic
    Atcera.com
    https://www.atcera.com › Aluminum Nitride Ceramic
    Aluminum nitride ceramic electrostatic chuck is a kind of adsorption fixture tool, used in semiconductor and solar cell industries for production process.Read more

    Electrostatic chucks | Products | NGK Corporation


    ngk-global.com
    https://www.ngk-global.com › product › sc-chack
    ngk-global.com
    https://www.ngk-global.com › product › sc-chack
    These electrostatic chucks are designed to chuck the silicon wafer and keep it flat, allowing the wafer to uniformly dissipate the heat received from the ...Read more

    Electrical properties, microstructure, and thermal ...


    ScienceDirect.com
    https://www.sciencedirect.com › article › abs › pii
    ScienceDirect.com
    https://www.sciencedirect.com › article › abs › pii
    by Q Luo · 2024 · Cited by 18 — AlN ceramics exhibit good physical and chemical properties and are ideal materials for the dielectric layer of electrostatic chucks.Read more

    AlN Electrostatic Chuck


    Edgetech Industries
    https://www.edge-techind.com › Advanced-Ceramics › A...
    Edgetech Industries
    https://www.edge-techind.com › Advanced-Ceramics › A...
    We offer custom aluminum nitride electrostatic chuck. Edgetech Industries, Advanced Ceramics Division supplies high-quality Aluminum nitride (AlN) Ceramics ...Read more

    Ceramic electrostatic chuck: How is this semiconductor ...


    cersol
    https://www.ceramic-solutions.com › Scientific-Articles
    cersol
    https://www.ceramic-solutions.com › Scientific-Articles
    Apr 24, 2024 — Therefore, electrostatic chuck technology mainly uses alumina ceramics or aluminum nitride ceramics as the main material. Generally speaking, ...Read more

    Why ESC Manufacturers Are Switching to AlN Ceramic ...


    Advanced Ceramic Materials
    https://www.preciseceramic.com › blog › why-esc-man...
    Advanced Ceramic Materials
    https://www.preciseceramic.com › blog › why-esc-man...
    Jan 28, 2026 — AlN's CTE is a near-perfect match to silicon wafer (~3 ppm/K). This allows ESC manufacturers to design chucks for thinner wafers and wider ...Read more

    ALN material and electrostatic chuck incorporating same


    Google Patents
    https://patents.google.com › patent
    Google Patents
    https://patents.google.com › patent
    An electrostatic chuck is provided which includes a ceramic body comprising aluminum nitride (AlN), and at least one electrode in the ceramic body.

    Aluminum Nitride Ceramic Electrostatic Chuck for ...


    Fujian Huaqing Electronic Material Technology Co.,Ltd
    https://www.huaqingcn.com › aluminum-nitride-ceramic...
    Fujian Huaqing Electronic Material Technology Co.,Ltd
    https://www.huaqingcn.com › aluminum-nitride-ceramic...
    Our aluminum nitride has good resistance to oxidation, chemical attack, thermal shock, mechanical strength, low dielectric constant, coefficient of thermal ...Read more

    Electrostatic Chucks (ESCs) | Fine Ceramics (Advanced ...


    Kyocera
    https://global.kyocera.com › ... › Product Categories
    Kyocera
    https://global.kyocera.com › ... › Product Categories
    This product is used for silicon wafer mounting, flatness correction and cooling the silicon wafer during the semiconductor manufacturing process.Read more
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    Scholarly articles for Aluminum Nitride Ceramic Electrostatic Chuck

    Ceramic electrode materials for electrostatic chuck … - ‎Choi - Cited by 3
    … electrostatic chuck performance through ZrO₂/ … - ‎Lim - Cited by 5
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