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AI Overview

MEMS accelerometer calibration ensures accuracy by determining key parameters—zero offset, scale factor, and cross-axis sensitivity—using methods like the 6-position gravity test (static) or shaker table testing (dynamic)

. Sensitivity analysis evaluates how input vibrations affect output voltage, with typical DC MEMS sensitivity ranging from 100 to 1000 mV/g, or specialized high-g units in

mu s / g

. Key techniques include temperature compensation, multiaxis calibration, and non-linear, second-order polynomial modeling.

MEMS Accelerometer Calibration Techniques

Calibration translates raw sensor output (voltage or digital bits) into meaningful physical units (g or

m / s squared

Static (Gravity-Based) Calibration: Involves placing the sensor in specific orientations (e.g., 6-position method) to align sensitive axes with earth gravity (

$plus or minus 1 g$

).
Dynamic Calibration: Uses a shaker table to apply known accelerations over a frequency range (e.g., 1 Hz to 1000 Hz) to determine frequency response and sensitivity, commonly used for DC MEMS accelerometers.
In-Field Calibration: Utilizes local gravity or, in some cases, Earth's rotation to calibrate without specialized, high-precision laboratory equipment.
Key Parameters Determined:
- Zero Offset (Bias): Output at 0g.
- Scale Factor (Sensitivity): Slope of the input-output curve.
- Cross-Axis Sensitivity: Errors caused by acceleration on unintended axes.

Sensitivity Analysis and Factors

Sensitivity analysis examines the relationship between mechanical input (acceleration) and electrical output, often expressed as

mV/g

Influence of Structure: Sensitivity is heavily influenced by the resonant frequency and proof mass; increasing vibration amplitude can reduce sensitivity in some time-domain MEMS, where sensitivity is measured in

$mu s / g$

.
Non-linearity: MEMS often exhibit non-linear sensitivity, requiring higher-order polynomial calibration, particularly under high-g loads.
Temperature Effects: Sensitivity, zero-g offset, and nonlinearity often change with temperature, necessitating compensation in a controlled chamber to maintain accuracy.

Common Calibration Procedures

Mounting: Rigidly mount the sensor on a, often, 3-axis table.
6-Position Test: Measure output at

$plus or minus x comma plus or minus y comma plus or minus z$

orientations relative to gravity.
Data Acquisition: Record data (often using automated, scripted tools like Excel macros).
Error Calculation: Determine offset and scaling factors using least squares regression.
Validation: Test against a known reference sensor to ensure accuracy, with high-performance units needing to stay within 5% of nominal sensitivity.

Calibrating MEMS DC Accelerometers - The Modal Shop
On-Site Testing for High Sensitivity MEMS Accelerometers. High sensitivity MEMS-based accelerometers (known by a host of names, su...

The Modal Shop
Calibration of MEMS Sensors for Precision Measurement of Acceleration, Spin and Attitude | IEEE Conference Publication

IEEE
Dynamic Multi-Axis Calibration of MEMS Accelerometers for ...
As proposed by different authors, the calibration techniques for MEMS accelerometers can be generally divided into: * Non-autonomo...

National Institutes of Health (NIH) | (.gov)

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Videos

Design and Analysis of MEMS Accelerometers

YouTube Diego Emilio Serrano

Feb 1, 2023

1:38:20

In this session I'm gonna be covering uh the design and Analysis of mems accelerometer so I discovered the gyroscope session.

Calibrating DC MEMS Accelerometers with a Portable ...

YouTube The Modal Shop

May 31, 2019

6:34

Duplicate the OEM's calibration process for DC MEMS accelerometers from 1 to 100 Hz using a portable vibration calibrator.

Selecting the Best Accelerometer for Your Test

YouTube The Modal Shop

Oct 29, 2019

50:09

Learn about accelerometer types, designs, characteristics, and applications in this webinar series on accelerometer design and theory.

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Dynamic Multi-Axis Calibration of MEMS Accelerometers for ...

National Institutes of Health (NIH) | (.gov)

https://pmc.ncbi.nlm.nih.gov › articles › PMC11990945

National Institutes of Health (NIH) | (.gov)

https://pmc.ncbi.nlm.nih.gov › articles › PMC11990945

by L Chiominto 2025 Cited by 2 — The calibration test bench was designed and tested to perform multi-axis dynamic sensitivity analysis by alternative oscillations driven by an electrical ... Read more

Calibrating MEMS DC Accelerometers

The Modal Shop

https://www.modalshop.com › seismic-vibration › calibra...

The Modal Shop

https://www.modalshop.com › seismic-vibration › calibra...

Watch and learn how to calibrate a MEMS Acceleration sensor using a Low Frequency Portable Vibration Calibrator Model 9210D. Read more

Verifying MEMS Accelerometer Accuracy Without a Lab

Unmanned Systems Technology

https://www.unmannedsystemstechnology.com › feature

Unmanned Systems Technology

https://www.unmannedsystemstechnology.com › feature

Calibrating a MEMS accelerometer does not require lab-grade equipment or outsourced metrology services. For users of Silicon Designs MEMS DC accelerometers, ... Read more

simultaneous 3-axis mems accelerometer primary ...

IMEKO

https://www.imeko.org › publications › IMEKO-...

IMEKO

https://www.imeko.org › publications › IMEKO-...

PDF

by A Schiavi Cited by 13 — Abstract − A procedure and a method for simultaneous. 3-axis accelerometer primary calibration is presented. Nowadays, in the field of vibration monitoring, ... Read more

4 pages

Calibration of Accelerometer Vibration Sensitivity by ...

College of Engineering | Michigan State University

https://www.egr.msu.edu › group10 › Chris

College of Engineering | Michigan State University

https://www.egr.msu.edu › group10 › Chris

PDF

by C Vogler 2015 Cited by 2 — In order to provide accurate data, accelerometers need to be calibrated to ensure they cover the correct frequency range and their sensitivity ... Read more

10 pages

Electrical Stimulus Based Calibration of MEMS ...

IEEE

https://ieeexplore.ieee.org › document

IEEE

https://ieeexplore.ieee.org › document

by I Bassi 2024 — In our research, we propose an electrical stimulus-based calibration method for sensors during production and in-field use. Read more

Missing: ~~analysis~~ ‎| Show results with: analysis

Comparison of calibration methods for accelerometers ...

ScienceDirect.com

https://www.sciencedirect.com › article › abs › pii

ScienceDirect.com

https://www.sciencedirect.com › article › abs › pii

by A Nez 2016 Cited by 48 — This paper focuses on calibr ation methods for MEMS accelerometers which are intended to be used in human motion analysis. As papers dealing with sensor ... Read more

Choosing the Most Suitable MEMS Accelerometer for Your ...

Analog Devices

https://www.analog.com › analog-dialogue › articles › c...

Analog Devices

https://www.analog.com › analog-dialogue › articles › c...

Key criteria: Bias stability, offset over temperature, low noise, repeatability, vibration rectification, cross-axis sensitivity . Accurate inclination or tilt ... Read more

MEMS accelerometer calibration optimizes accuracy for ...

EE Times

https://www.eetimes.com › mems-accelerometer-calibrati...

EE Times

https://www.eetimes.com › mems-accelerometer-calibrati...

Oct 27, 2007 — One reliable source of stimulus for low-g accelerometer calibration is gravity. The simplest means of using gravity is through the use of the ... Read more

Scholarly articles for mems accelerometer calibration and sensitivity analysis
… of mems accelerometer for optimized sensitivity - ‎ Khamil - Cited by 12 … and calibration of a high-G MEMS accelerometer - ‎ Shi - Cited by 51 Robust optimization of a MEMS accelerometer … - ‎ Liu - Cited by 37