Search Results
AI Overview
UV laser drilling of silicon wafers utilizes high-energy, ultraviolet (UV) pulsed lasers to create precise micro-holes and cuts with minimal thermal damage or material chipping. Commonly used in semiconductor fabrication, it is ideal for micro-machining, dicing, and drilling, offering superior precision for holes as small as a few microns.
Key Advantages of UV Laser Drilling
- Minimal Thermal Affect: UV lasers enable "cold ablation," which minimizes heat-affected zones, reduces cracking, and results in smooth, clean edges on silicon.
Show more
Web results
UV Laser Cutting Silicon Wafers: A Revolutionary ...
RFH Laser
https://www.rfhtech.com › Knowledge
RFH Laser
https://www.rfhtech.com › Knowledge
UV laser cutting is a process that utilizes a high-powered ultraviolet laser beam to cut through materials with precision.Read more
Discussions and forums
Is it possible to cut a ~0.6 mm silicon wafer with a laser using a hobby setup?
Reddit ·
r/lasercutting
· 20+ comments
· 3 months ago
Is it possible to cut a ~0.6 mm silicon wafer with a laser using a hobby setup?
Reddit ·
r/lasercutting
· 20+ comments
· 3 months ago
Scribing/Engraving Silicon Wafers?
Reddit ·
r/lasercutting
· 6 comments
· 3 months ago
Scribing/Engraving Silicon Wafers?
Reddit ·
r/lasercutting
· 6 comments
· 3 months ago
See more
Web results
UV laser drilling of SiC for semiconductor device fabrication
IOPscience
https://iopscience.iop.org › article
IOPscience
https://iopscience.iop.org › article
by O Krüger2007Cited by 22 — Pulsed UV laser processing is used to drill micro holes in silicon carbide (SiC) wafers supporting AlGaN/GaN transistor structures.Read more
Alabama UV Laser - SUMS
Georgia Institute of Technology
https://sums.gatech.edu › articles › alabamalaser
Georgia Institute of Technology
https://sums.gatech.edu › articles › alabamalaser
The Georgia Tech IEN Alabama UV laser is a 355nm laser designed to work on silicon wafers for the photovoltaic industry. It has a 70um spot size and a 200mm ...Read more
Wafer Marking With Lasers: Utmost Precision Without ...
Control Micro Systems (CMS Laser)
https://cmslaser.com › Blog
Control Micro Systems (CMS Laser)
https://cmslaser.com › Blog
Sep 1, 2025 — On our floor now a visitor can find an ytterbium fiber laser system built with a cassette-to-cassette workstation for 8-inch silicon wafers, ...Read more
High Speed Drilling of Thin Silicon Wafer by UV Laser
AIP Publishing
https://pubs.aip.org › ica.v2001.i1.1612_1.online.pdf
AIP Publishing
https://pubs.aip.org › ica.v2001.i1.1612_1.online.pdf
by I Miyamoto2001Cited by 9 — The authors have tried to use UV laser for via hole drilling silicon wafer. In this paper, the mechanism of laser drilling thin silicon wafer is discussed on ...Read more
Wafer Marking: Laser Solutions for Semiconductor ...
Laserax
https://www.laserax.com › blog › wafer-marking
Laserax
https://www.laserax.com › blog › wafer-marking
Dec 17, 2025 — Silicon is the most common substrate used in semiconductor manufacturing and supports both debris-free soft marking and ablation. Glass Wafers.Read more
Silicon Wafer Dicing and Scribing System - Han's Laser
hanslaserus.com
https://www.hanslaserus.com › product › wafer-laser-mar...
hanslaserus.com
https://www.hanslaserus.com › product › wafer-laser-mar...
Ultraviolet laser processing is a cold processing method that solves accumulation, making it an ideal wafer marking program. Automatic wafer pick-up from the ...Read more
A review on laser drilling and cutting of silicon
ScienceDirect.com
https://www.sciencedirect.com › article › abs › pii
ScienceDirect.com
https://www.sciencedirect.com › article › abs › pii
by HJ Wang2021Cited by 110 — As a new way of material internal processing, laser stealth dicing is the most promising method in the field of wafer cutting. The mechanism and processing ...Read more
Can I laser cut a silcon wafer? : r/lasercutting
Reddit · r/lasercutting
9 comments · 9 years ago
Reddit · r/lasercutting
9 comments · 9 years ago
I doubt the laser will do what you want since silicon can absorb a huge amount of heat and the whole reason laser ablation works is be super ...Read more
Scholarly articles for UV Laser drilling silicon wafers | |
… hole drilling for wafer level chip stacking by UV laser - Lee - Cited by 38 Deep micro hole drilling in a silicon substrate using … - Tan - Cited by 106 UV laser drilling of SiC for semiconductor device … - Krüger - Cited by 22 | |


